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Remote plasma : ウィキペディア英語版
Remote plasma

A remote plasma (also downstream plasma or afterglow plasma) is a plasma processing method in which the plasma and material interaction occurs at a location remote from the plasma in the plasma afterglow.
==See also==

*Plasma cleaning
*Plasma-activated bonding
*Corona treatment
*Plasma chemistry
*Chemical vapor deposition
*Physical vapor deposition
*Reactive ion etching
*List of plasma (physics) applications articles

抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
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